PHK – Scanning Electron Microscope (SEM)

Scanning electron microscope with SE, BSE, in-beam SE, EDX and WDX detectors.

Field Emission Gun (Schottky Emitter) catode with accelerating voltage 0.05 - 30 kV,

Resolution in high-vacuum mode

SE

1.2 nm at 30 keV

2.5 nm at 3 keV

In-Beam SE

1.0 nm at 30 keV

Resolution in low-vacuum mode

BSE

2.0 nm at 30 keV

EDX and WDX detectors

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